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Active Vibration Microscope Laser handheld interferometer MPB05

$41,600.00 $62,400.00
Unit price  per 

Experience Precision with the Active Vibration Microscope Laser Handheld Interferometer:

Revolutionizing Semiconductor Manufacturing: Our Linear Active Vibration Isolation Unit, controlled by linear motors, enhances productivity in semiconductor manufacturing and inspection.

Combining the Best of Both: This active vibration isolator combines the strengths of linear motor control and pneumatic control types, ensuring optimal performance.

Major applications 惻Semiconductor Manufacturing Equipment 惻Inspection Equipment

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Exceptional Vibration Control: Our unique control system delivers outstanding vibration isolation and damping, facilitated by high-thrust linear motors and motion feed-forward control.

Minimal Air Consumption: Benefit from reduced air consumption and superior anti-vibration performance, enhancing overall efficiency in vibration control applications.

Superior Performance: With pre-inputted stage movement information and advanced vibration-damping capabilities, our active unit guarantees superior vibration isolation performance.

Upgrade your laboratory with our Active Vibration Microscope Laser Handheld Interferometer, the pinnacle of precision and productivity.

Product Models: - EST-L6HKP-200L - EST-L6HKP-200M - EST-L6HKP-200H - EST-L8HKP-200

Actuator: Linear Motor

Control Method:

  • FB & FF 6-flexible control
  • MFF (Motion Feed-Forward Control)

Leveling System: Automatic Leveling

Controller: Digital Controller

Maximum Loading Weight (kg):

  • EST-L6HKP-200L: 340 to 570
  • EST-L6HKP-200M: 460 to 670
  • EST-L6HKP-200H: 570 to 750
  • EST-L8HKP-200: 640 to 1250

Dimensions (mm):

  • 315x315 (EST-L6HKP-200L)
  • 350x350 (EST-L6HKP-200M)
  • Operating Height (mm): 220

Weight (kg):

  • 70 (EST-L6HKP-200L)
  • 90 (EST-L6HKP-200M)

  • Warranty : 5 Years
  • Model Number : MP803