Experience Precision with the Active Vibration Microscope Laser Handheld Interferometer:
Revolutionizing Semiconductor Manufacturing: Our Linear Active Vibration Isolation Unit, controlled by linear motors, enhances productivity in semiconductor manufacturing and inspection.
Combining the Best of Both: This active vibration isolator combines the strengths of linear motor control and pneumatic control types, ensuring optimal performance.
Major applications ć»Semiconductor Manufacturing Equipment ć»Inspection Equipment

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Exceptional Vibration Control: Our unique control system delivers outstanding vibration isolation and damping, facilitated by high-thrust linear motors and motion feed-forward control.
Minimal Air Consumption: Benefit from reduced air consumption and superior anti-vibration performance, enhancing overall efficiency in vibration control applications.
Superior Performance: With pre-inputted stage movement information and advanced vibration-damping capabilities, our active unit guarantees superior vibration isolation performance.
Upgrade your laboratory with our Active Vibration Microscope Laser Handheld Interferometer, the pinnacle of precision and productivity.